Semiconductor Material and Device Characterization

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John Wiley & Sons, 10.02.2006. - 800 страница
This Third Edition updates a landmark text with the latest findings

The Third Edition of the internationally lauded Semiconductor Material and Device Characterization brings the text fully up-to-date with the latest developments in the field and includes new pedagogical tools to assist readers. Not only does the Third Edition set forth all the latest measurement techniques, but it also examines new interpretations and new applications of existing techniques.

Semiconductor Material and Device Characterization remains the sole text dedicated to characterization techniques for measuring semiconductor materials and devices. Coverage includes the full range of electrical and optical characterization methods, including the more specialized chemical and physical techniques. Readers familiar with the previous two editions will discover a thoroughly revised and updated Third Edition, including:

  • Updated and revised figures and examples reflecting the most current data and information
  • 260 new references offering access to the latest research and discussions in specialized topics
  • New problems and review questions at the end of each chapter to test readers' understanding of the material

In addition, readers will find fully updated and revised sections in each chapter.

Plus, two new chapters have been added:

  • Charge-Based and Probe Characterization introduces charge-based measurement and Kelvin probes. This chapter also examines probe-based measurements, including scanning capacitance, scanning Kelvin force, scanning spreading resistance, and ballistic electron emission microscopy.
  • Reliability and Failure Analysis examines failure times and distribution functions, and discusses electromigration, hot carriers, gate oxide integrity, negative bias temperature instability, stress-induced leakage current, and electrostatic discharge.

Written by an internationally recognized authority in the field, Semiconductor Material and Device Characterization remains essential reading for graduate students as well as for professionals working in the field of semiconductor devices and materials.

An Instructor's Manual presenting detailed solutions to all the problems in the book is available from the Wiley editorial department.

 

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Садржај

Chapter 1 Resistivity
1
Chapter 2 Carrier and Doping Density
61
Chapter 3 Contact Resistance and Schottky Barriers
127
Chapter 4 Series Resistance Channel Length and Width and Threshold Voltage
185
Chapter 5 Defects
251
Chapter 6 Oxide and Interface Trapped Charges Oxide Thickness
319
Chapter 7 Carrier Lifetimes
389
Chapter 8 Mobility
465
Chapter 10 Optical Characterization
563
Chapter 11 Chemical and Physical Characterization
627
Chapter 12 Reliability and Failure Analysis
689
Appendix 1 List of Symbols
741
Appendix 2 Abbreviations and Acronyms
749
Index
755
EULA
782
Ауторска права

Chapter 9 Chargebased and Probe Characterization
523

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О аутору (2006)

DIETER K. SCHRODER, PhD, is Professor, Department of Electrical Engineering, Arizona State University. He is a recipient of the ASU College of Engineering Teaching Excellence Award and several other teaching awards. In addition to Semiconductor Material and Device Characterization, Dr. Schroder is the author of Advanced MOS Devices.

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