Correlation Between Microstructure and Surface Structure Evolution in Polycrystalline FilmsUniversity of Michigan, 2000 |
Садржај
CHAPTER | 6 |
MICROSTRUCTURE EVOLUTION IN SPUTTER DEPOSITED | 23 |
SURFACE MORPHOLOGY EVOLUTION IN SPUTTER | 46 |
Ауторска права | |
други делови (4) нису приказани
Чести термини и фразе
1DPSD adatom AFM images AlCu films AlCu/SiO2 films AlCu/Ti films atomic average characteristic dimensions characterized correlation length crystal film crystallographic texture deposited on SiO2 deposition rate deposition temperature effect electroplated energy minimization EP Cu films fiber plots fiber texture film growth film microstructure film normal film structure film surface film texture films deposited grain boundary grain growth grain morphology grain size growth mode height homologous temperature increase kinetics length scales Lett lognormal distribution measurements median grain microstructure evolution nucleation oriented grains peak Phys planes pole figure polycrystalline films polycrystalline thin films Power spectral density random randomly oriented recrystallization recrystallization process regime RHEED ridge spacing roughening Rrms sample scaling exponent scan selected area diffraction self-affine smoothing sputter deposited substrate surface diffusion surface evolution surface morphology evolution surface roughness T/Tm texture component texture evolution thin films transition twin underlayer volume fraction wafer x-ray